著書論文等- 田中 秀治 -
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件数:561件
[2015]
1.[] Preferentially oriented growth of L10 FePt on Si substrate.[Acta Physica Polonica A,127,(2015),611-613]N. KAUSHIK, P. SHARMA, S. TANAKA, A. MAKINO, M. ESASHI
2.[] Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb-doped PZT thin film.[Sensors and Actuators A,233,(2015),147-157]Takayuki Naono, Takamichi Fujii, Masayoshi Esashi, Shuji Tanaka
3.[] マイクロ熱ダイオードのための作動流体封止方法の検討.[日本機械学会2015年度年次大会,(2015),J0540103-]佐藤功一, 塚本貴城, 田中秀治,
4.[] 今,なぜMEMSが注目されているのか.[金属,85(9), (2015), 683-685]田中秀治
5.[] 集積回路上でのBST薄膜可変容量とAuめっき厚膜インダクタのモノリシック集積化.[電気学会論文誌E,135(8),(2015),323-329]浅野翔, Ramesh Pokharel, Awinash Anand, 平野栄樹, 田中秀治
6.[] Integration of Boron-Doped Diamond Microelectrodes on CMOS-based Amperometric Sensor Array by Film Transfer Technology.[Journal of Microelectromechanical Systems,24(4),(2015),958-967]Takeshi Hayasaka, Shinya Yoshida, Kumi Y. Inoue, Masanori Nakano, Tomokazu Matsue, Masayoshi Esashi, Shuji Tanaka
7.[] Advanced Piezoelectric Thin Films and Devices.[19th Nano Engineering and Microsystem Technology Conference,(2015)]Shuji Tanaka
8.[] Moving Tunable Filters Forward, IEEE Microwave Magazine.[IEEE Microwave Magazine, (2015), 89-97]Ken-ya Hashimoto, Tetsuya Kimura, Takeshi Matsumura, Hideki Hirano, Michio Kadota, Masayoshi Esashi
9.[] Free-standing subwavelength grid infrared cut filter of 90 mmdiameter for LPP EUV light source.[Sensors and Actuators A,231,(2015),59-64]Yukio Suzukia, Kentaro Totsua, Masaaki Moriyamaa, Masayoshi Esashia, Shuji Tanaka
10.[] 真空蒸着Eu(TTA)3薄膜を用いた赤外線熱イメージングセンサー.[電気学会センサ・マイクロマシン部門総合研究会, マイクロマシン・センサシステム研究会, 電気学会研究会資料,(2015),7-12]王敏, 塚本貴城, 田中秀治
11.[] 異なる市販ゾルを用いたゾル・ゲル法によるPZT薄膜の成膜と評価.[電気学会センサ・マイクロマシン部門総合研究会, マイクロマシン・センサシステム研究会, 電気学会研究会資料,(2015),13-18]森山雅昭, 田中秀治
12.[] ウェハレベルCu-Cu真空封止接合のためのリモート型ホットワイヤ装置の開発.[第12回Cat-CVD研究会, 講演予稿集,(2015),36-37]田中康基, 熊野勝文, 田中秀治
13.[] Structural, Mechanical and Optical Properties of Thin Films deposited from Graphitic Carbon Nitride.[22nd International Symposium on Metastable, Amorphous and Nanostructured Materials, Book of Abstracts,(2015),401-]Neelam Kaushik, Parmanand Sharma, Shuji Tanaka, Masahiko Nishijima, Akihiro Makino, Masayoshi Esashi
14.[] Simulation of solidity mounted plate wave resonator with wide bandwidth using 0-th shear horizontal mode in LiNbO3 plate.[Japanese Journal of Applied Physics,54,(2015),07HD09-]Michio Kadota, Shuji Tanaka
15.[] Essence of MEMS for VLSI Players.[2015 VLSI Technology Short Course "More-than-Moore and More Moore fir IoT", 2015 Symposium on VLSI Technology,(2015)]Shuji Tanaka
16.[] FLIPPED CMOS-DIAPHRAGM CAPACITIVE TACTILE SENSOR SURFACE MOUNTABLE ON FLEXIBLE AND STRETCHABLE BUS LINE.[18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015,(2015),97-100]S. Asano, M. Muroyama, T. Bartley, T. Kojima, T. Nakayama, U. Yamaguchi, H. Yamada, Y. Nonomura, Y. Hata, H. Funabashi, S. Tanaka
17.[] COMPREHENSIVE STUDY ON WAFER-LEVEL VACUUM PACKAGING USING ANODICALLY-BONDABLE LTCC WAFER AND THIN FILM GETTER.[18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015,(2015),468-471]Shuji Tanaka, Hideyuki Fukushi
18.[] LARGE FIGURE-OF-MERIT EPITAXIAL PB(MN,NB)O3-PB(ZR,TI)O3/SI TRANSDUCER FOR PIEZOELECTRIC MEMS SENSORS.[18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015,(2015),1338-1341]Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa, Shuji Tanaka
19.[] THE WAFER-LEVEL VACUUM SEALING AND ELECTRICAL INTERCONNECTION USING ELECTROPLATED GOLD BUMPS PLANARIZED BY SINGLE-POINT DIAMOND FLY CUTTING.[18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015,(2015),1283-1286]H. Hirano, K. Hikichi, S. Tanaka
20.[] RING-SHAPE SMA MICRO ACTUATOR WITH PARYLENE RETENTION SPRING FOR LOW POWER CONSUMPTION, LARGE DISPLACEMENT LINEAR ACTUATION.[18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015,(2015),2148-2151]T. D. O. Moura, T. Tsukamoto, D. W. de Lima Monteiro, S. Tanaka
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