論文- 吉田 慎哉 -
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件数:121件
[2018]
1.Concept Proof of Low-Energy Consumption and Compact Ingestible Thermometer Based on Gastric Acid Power Generation.[電気学会論文誌E,138(4),(2018),164-169]Shinya Yoshida, Hiroshi Miyaguchi, Tsutomu Nakamura
10.1541/ieejsmas.138.164
2.Sputter Epitaxy of Pb(Zr,Ti)O3 and Pb(Mg1/3,Nb2/3)O3-PbTiO3 Thin Films on Si for High-Performance Piezoelectric MEMS.[The proceedings of Smart Systems Integration,(2018),233-239]吉田 慎哉
3.Ultrasonic MEMS Rangefinder with 2 m Range at 1 V Drive Based on Large Figure-of-Merit PMnN-PZT Epitaxial Thin Film.[Abstract of PiezoMEMS 2018 Workshop,(2018)]Shinya Yoshida and Shuji Tanaka
4.エピタキシャルPMnN-PZTを用いたMEMS超音波レンジファインダ.[日本学術振興会「弾性波素子技術 第150委員会」第151回 研究会資料,(2018),25-30]周朕,吉田慎哉,田中秀治
5.“Investigation of Piezoelectricity and Curie Temperature of Pb(Mg1/3,Nb2/3)O3-PbTiO3 Epitaxial Thin Film on Si Prepared by Sputter Deposition with Fast Cooling”.[IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,Accepted,(2018)]Shinya Yoshida, Takumi Morimura, Kiyotaka Wasa and Shuji Tanaka
[2017]
6.Development of Basic System of Ingestible Core Body Thermometer with Small Size and Low Energy Consumption Powered by Gastric Acid Battery.[The proceedings of IEEE Sensors 2017,(2017),1248-1250]Shinya Yoshida, Hiroshi Miyaguchi and Tsutomu Nakamura
7.Development of buffer layer structure for epitaxial growth of (100)/(001)Pb(Zr,Ti)O3-based thin film on (111)Si wafer..[Japanese Journal of Applied Physics,56,(2017),071501]Takeshi Hayasaka, Shinya Yoshida and Shuji Tanaka
10.7567/JJAP.56.071501
8.MONOCRYSTALLINE PMNN-PZT THIN FILM ULTRASONIC RANGEFINDER WITH 2 METER RANGE AT 1 VOLT DRIVE.[The proceedings of Transducers 2017,(2017),167-170]Zhen Zhou, Shinya Yoshida, and Shuji Tanaka
9.スパッタ急冷法によってSi基板上に形成した大圧電特性・高キュリー温度PMN-PTエピタキシャル薄膜.[第34回強誘電体応用会議 講演予稿集,(2017),23-24]森村拓巳,吉田慎哉,長谷川幸弘,和佐清孝,田中秀治
10.エピタキシャルPMnN-PZT/Si トランスデューサを用いた高S/N 比pMUT レンジファインダー.[第64回応用物理学会春季学術講演会 講演予稿集,(2017),16p-411-6]吉田 慎哉,周 朕,田中 秀治
11.Epitaxial PMnN-PZT/Si MEMS Ultrasonic Rangefinder with 2 m Range at 1 V Drive.[Sensors & Actuators: A. Physical,266,(2017),352-360]Zhen Zhou, Shinya Yoshida and Shuji Tanaka
10.1016/j.sna.2017.09.058
12.Epitaxial growth of metallic buffer layer structure and c-axis oriented PMnN-PZT thin film on Si for high performance pMUT.[Japanese Journal of Applied Physics,56,(2017),127201]Pham Ngoc Thao, Shinya Yoshida and Shuji Tanaka
10.7567/JJAP.56.127201
[2016]
13.Enhanced Curie Temperature and High Heat Resistivity of PMnN-PZT Monocrystalline Thin Film on Si.[Sensors & Actuators: A. Physical,251,(2016),100-107]Shinya Yoshida, Hiroaki Hanzawa, Kiyotaka Wasa, Shuji Tanaka
10.1016/j.sna.2016.10.009
14.Sputtering Epitaxy of Highly c-Axis Oriented PMnN-PZT Thin Film on SrRuO3/Pt/Ir/YSZ/Si for Piezoelectric MEMS Sensors..[第33回 「センサ・マイクロマシンと応用システム」シンポジウム講演予稿集,33,(2016),24pm2-B-3]Pham Ngoc Thao,Shinya Yoshida,Shuji Tanaka
15.Development of a 17×17 Parallel Electron Beam Lithography System.[IEEJ Transactions on Sensors and Micromachines,136,(2016),413-419]Hiroshi Miyaguchi, Masanori Muroyama, Shinya Yoshida, Naokatsu Ikegami, Akira Kojima, Shuji Tanaka, Masayoshi Esashi
10.1541/ieejsmas.136.413
16.Si基板上c軸配向PMnN-PZTエピタキシャル急冷薄膜の面内ひずみの高温XRD解析.[第77回応用物理学会秋季学術講演会 講演予稿集,(2016),13a-A23-1-]吉田 慎哉,田中 秀治
17.Deposition Temperature Dependency of Characteristics of PMnN-PZT Epitaxial Thin Film on Si Prepared by Sputter Deposition with Fast Cooling.[第77回応用物理学会秋季学術講演会 講演予稿集,(2016),13a-A23-2-]Zhen Zhou、Shinya Yoshida、Shuji Tanaka
18.Feasibility Study of Ingestible Sensor Platform Powered by Gastric Acid Battery for Daily Health Care.[Proceedings of the 16th International Conference on Nanotechnology,(2016),724-727]S. Yoshida, H. Miyaguchi and T. Nakamura
19.Sputter Epitaxy of Large Figure-of-Merit PMnN-PZT thin film on Si for Ultrahigh-Performance Piezoelectric MEMS Sensor.[The abstracts of the 11th Korea-Japan Conference on Ferroelectrics,(2016),8]Shinya Yoshida
20.PZT/BiScO3-PTスパッタ薄膜の高温XRD特性.[圧電材料・デバイスシンポジウム2016 講演予稿集,(2016),67-70]和佐清孝,半澤弘明,吉田慎哉,柳谷隆彦,田中秀治
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