Researchers Information
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Books, Original Papers & Review Papers
Name
SHIMA Kohei
Affiliation
Institute of Multidisciplinary Research for Advanced Materials
Division of Measurements
Quantum Optoelectronics
Title
Assistant Professor
Date of Birth
1988.10
Research Fields
  • Applied physical properties/crystal engineering
  • Reaction engineering/process system
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Keywords
Semiconductor optoelectronics, Dry process, Device prosess design
Academic Society Membership
  • 応用物理学会
  • 化学工学会
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Original Papers

High-aspect-ratio parallel-plate microchannels applicable to kinetic analysis of chemical vapor deposition.[Advanced Materials Interfaces,3,(2016),1600254-1--1600254-11]Kohei Shima, Yuichi Funato, Hidetoshi Sugiura, Noboru Sato, Yasuyuki Fukushima, Takeshi Momose, and Yukihiro Shimogaki
10.1002/admi.201600254


Comparative Study on Cu-CVD Nucleation Using β-diketonato and Amidinato Precursors for Sub-10-nm-Thick Continuous Film Growth.[ECS Journal of Solid State Science and Technology,4,(2015),P305-P313]Kohei Shima, Hideharu Shimizu, Takeshi Momose, and Yukihiro Shimogaki
10.1149/2.0061508jss


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Review Papers

Sub-nanoscale Structure and Barrier Performance of CVD-Cu(Mn)/ALD-Co(W) Interconnect System Proved Using 3D Atom Probe.[IEICE technical report,114, (2015), 39-44]嶋紘平, 涂远, 韓斌, 高見澤悠, 清水秀治, 清水康雄, 百瀬健, 井上耕治, 永井康介, 霜垣幸浩


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Honours, Awards and Prizes
  • The Bruce Deal & Andy Grove Young Author Award 2015(2015)
  • 化学工学会反応工学部会CVD反応分科会 平成27年度 奨励賞(2015)
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Updated on
2019.06.12
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