Researchers Information
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Books, Original Papers & Review Papers
Name
SAMUKAWA Seiji
Affiliation
Institute of Fluid Science
Innovative Energy Research Center (IER)
Green Nanotechnology Laboratory
Assigned Class
Graduate School of Engineering
Department of Finemechanics

Title
Professor
Date of Birth
1959.04
Research Fields
  • Thin film and surface interface physical properties
  • General applied physics
  • Plasma science
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Research Subjects
  • Atom and Molecules Degital Processes(2000-)
  • Study on Precise Plasma Processes(2000-)
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Keywords
Plasma, beam, atom manupilation, bio, surface science
Academic Society Membership
  • 応用物理学会プラズマエレクトロニクス分科会
  • 電気学会ドライプロセスシンポジウム
  • American Vacuum Society
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Activity of Academic Society (Post)
  • 応用物理学会プラズマエレクトロニクス分科会, 副幹事長(1999-2001)(1999-2001)
  • 電気学会ドライプロセスシンポジウム, 論文委員、運営委員(1994-)
  • 米国真空学会, Program committee, Executive committee(1997-2007)
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Books

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Original Papers

Effects of Discharge Frequency in Plasma Etching and Ultrahigh-Frequency Plasma Source for High-Performance Etching for Ultralarge-Scale Integrated Circuits.[Japanese Journal of Applied Physics,39,(2000),1583-1596]Seiji Samukawa, Vincent M. Donnelly and Mikahail V. Malyshev


Pulse-time-modulated ECR plasma discharge for highly selective, highly ansiotropic and charge-free etching.[Journal of Vacuum Science and Technology A,14,(1996),3049-3058]Seiji Samukawa, Hiroto Ohtake and Tetsu Mieno,


High-Performance Silicon Dioxide Etching for less than 0.1μm High-Aspect-Contact-Holes.[Journal of Vacuum Science and Technology B,18,(2000),166-171]Seiji Samukawa and Tomonori Mukai


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Review Papers

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Honours, Awards and Prizes
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    Activity of External Organization
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      Mail Address
      Mail Address
      Updated on
      2019.03.20
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